Design of low loss 193 nm HR mirror

Optics and Precision Engineering, Volume. 16, Issue 3, 392(2008)

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[in Chinese], [in Chinese], [in Chinese]. Design of low loss 193 nm HR mirror[J]. Optics and Precision Engineering, 2008, 16(3): 392

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Received: Nov. 20, 2007

Accepted: --

Published Online: Jul. 8, 2008

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