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Opto-Electronic Engineering, Volume. 42, Issue 3, 71(2015)

Effect of Gravity Deformation on the Wavefront of 90 nm Deep Ultraviolet Lithography Projection Optics

ZHANG Yun*... LIU Lihui, LI Yanqiu and LIU Yan |Show fewer author(s)
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    ZHANG Yun, LIU Lihui, LI Yanqiu, LIU Yan. Effect of Gravity Deformation on the Wavefront of 90 nm Deep Ultraviolet Lithography Projection Optics[J]. Opto-Electronic Engineering, 2015, 42(3): 71

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    Received: May. 28, 2014

    Accepted: --

    Published Online: Mar. 23, 2015

    The Author Email: Yun ZHANG (zhangyun_729@163.com)

    DOI:10.3969/j.issn.1003-501x.2015.03.012

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology