[1] [1] GUAN R, ZHANG W P, CHEN W Y, et al.. Research development of quartz micromachined gyroscope ［J］. Micronanoelectronic Technology, 2012, 49(3):174-180.(in Chinese)

[2] [2] ZHANG W P, CHEN W Y, ZHAO X L, et al.. Key technology, innovation design and current development of micro gyroscope with levitation rotor［J］. Journal of functional materials and devices, 2008,14(3): 721-728. (in Chinese)

[3] [3] CUI F, SU Y F, ZHANG W P, et al.. Micro gyroscope based on electrostatically levitated rotor and its key techniques ［J］. Journal of Chinese Inertial Technology, 2005,13(6):61-67.(in Chinese)

[4] [4] DAI Y Q. The Research of Magnetic Suspension Gyroscope Design and Driving Software［D］. Chengdu: University of Electronic Science and Technology of China, 2012. (in Chinese)

[5] [5] HU SH Y. The Research of Sensorless Brushless DC Motor System ［D］. Dalian: Dalian maritime university, 2012. (in Chinese)

[6] [6] WANG CH J, LI J M, MA Y CH. A rotational speed measurement system design based on magneto-resistive sensor ［J］. Computer Measurement & Control, 2013,21(2): 327-329. (in Chinese)

[7] [7] GUO W L. Study and Design of the Rotational Speed Measurement System Based on Difference of the Frequency［D］. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, 2011. (in Chinese)

[8] [8] LIN Y SH, WU Y M, YANG G ZH. Application of embedded system technology on shipboard navigation equipments ［J］. Ship Electronic Engineering, 2013,33(1):68-75. (in Chinese)

[9] [9] MA J SH, LI H Y, CHENG X M, et al.. Control system for embedded auto-focusing camera module［J］. Optics and Precision Engineering, 2012, 20(10):222-2228. (in Chinese)

[10] [10] LIN S. Design of Multipath Motor Controlling System［D］. Chengdu: University of electronic science and technology of China, 2011. (in Chinese)

[11] [11] HUANG Y X. High Precision Liquid Floating Gyro System Design Research［D］. Xi'an: Northwestern Polytechnical University, 2005. (in Chinese)

[12] [12] WANG L H. Application of the software ANSYS in electromagnetic field analysis of permanent magnet synchronous generator［J］. Metrology & Measurement Technique, 2012, 39(8): 39-40. (in Chinese)

[13] [13] SUN S CH, SHI G CH. Design and fabrication of micro rotational generators［J］. Opt. Precision Eng., 2011, 19(6): 1306-1312.(in Chinese)

[14] [14] LI ZH Q. Modeling and simulation of permanent-magnet synchronous motor based on ansoft ［J］. Mechanical & Electrical Engineering Technology, 2012,41(4):35-39. (in Chinese)