Acta Photonica Sinica, Volume. 36, Issue 3, 462(2007)
Removal of Pixel Structures by Optimizing the Parameters of Imaging System in Digital Photolithography
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Removal of Pixel Structures by Optimizing the Parameters of Imaging System in Digital Photolithography[J]. Acta Photonica Sinica, 2007, 36(3): 462