Infrared and Laser Engineering, Volume. 52, Issue 4, 20220676(2023)
Research on laser self-mixing nano-displacement measurement based on plane reflective holographic grating
Figures & Tables(10)
Fig. 1. Schematic diagram of a laser self-mixing nano-displacement measurement system based on a planar reflective holographic diffraction grating
Fig. 2. Schematic diagram of laser self-mixing measurement based on grating feedback
Fig. 3. Simulation results of laser self-mixing signal under sinusoidal displacement modulation and weak feedback condition. (a) Displacement signal of grating, where ; (b) Normalized optical power signal as a function of time 在正弦位移调制下，弱反馈时的光栅激光自混合信号仿真结果。（a）光栅的位移信号 ；（b）归一化的光功率信号 随时间变化的情况
Fig. 5. Normalized laser self-mixing signal based on the plane reflective holographic grating (The working current of laser diode is 40.6 mA, the displacement table makes a uniform linear reciprocating motion of 10 μm amplitude)
Fig. 7. Displacement reconstruction result of laser self-mixing interferometer based on plane reflective holographic grating
Fig. 8. Comparison diagram of reconstructed displacement between commercial interferometer and grating self-mixing interferometer
Table 1. Displacement mean and variance of grating laser self-mixing interferometer
View tableView in ArticleTable 1. Displacement mean and variance of grating laser self-mixing interferometer
Index $ \bar{x} $ $ {\Delta x}_{g}/\mathrm{n}\mathrm{m} $ $\mathrm{\sigma }\left(x\right)/{\rm{nm}}$ 1 11093.23 11092.5014 4.7112 2 0.7286 −11104.2314 5.8710 3 11104.96 11112.1661 3.4718 4 −7.2061 - 9.2199 Average value - 11102.9663 5.818475
Table 2. Displacement comparison measurement table between commercial interferometer QuDIS and grating laser self-mixing interferometer
View tableView in ArticleTable 2. Displacement comparison measurement table between commercial interferometer QuDIS and grating laser self-mixing interferometer
Index $\overline x $ $ \overline x $ $ \Delta x $ $ \Delta x $ Error 1 10006.52 10003.30 10005.8628 10000.0875 0.058% 2 0.6572 3.2125 −10016.4298 −10003.8375 0.126% 3 10017.087 10007.05 10023.5872 9999.4695 0.241% 4 −6.5002 7.5805 - - -
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Yujie Zhang, Lei Xu, Yuqing Guan, Wenzhe Zou, Chuangwei Guo, Lihua Lei, Yunxia Fu, Zhenyan Guo, Zhenjie Gu, Xiao Deng. Research on laser self-mixing nano-displacement measurement based on plane reflective holographic grating[J]. Infrared and Laser Engineering, 2023, 52(4): 20220676
Paper Information
Category: Photoelectric measurement
Received: Dec. 10, 2022
Accepted: --
Published Online: Jul. 4, 2023
The Author Email: Gu Zhenjie (19310207@tongji.edu.cn)
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