Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Photonica Sinica, Volume. 33, Issue 9, 1136(2004)

Autocontrol Technology of Optical Thin-film Manufacture Based on In-situ Broadband Optical Monitor

[in Chinese]... [in Chinese] and [in Chinese] |Show fewer author(s)
Author Affiliations
  • [in Chinese]
    • show less
    AbstractGet PDF
    Figures&Tables (0)
    Equations (0)
    References (4)
    Tools
    Paper Information
    Topics
    References(4)

    [1] [1] Pulker H K.Coatings on Glass.ElSEVIER,Amsterdam-Oxford-New York-Tokyo,1984,306～307

    [2] [2] Vidal B,Fronier A,Pelletier E.Wideband optical monitoring of nonquarterwave multilayer filters.Appl Opt, 1979,18(22):3851

    [4] [4] Telemark Co.Ltd,Model OM820 in-situ spectroscopic optical monitor user′s guide,2000

    [5] [5] Sainty W G,Sainty D W.Multiwavelength monitoring of thin film growth using a fiber spectrometer.Proceedings of SPIE, 2000,4094:31～37

    CLP Journals

    [1] Shang Xiaoyan, Han Jun, Jiang Xu. Merit Function Correction Technology of Thin-Film Thickness Wideband Monitoring System[J]. Laser & Optoelectronics Progress, 2012, 49(2): 23101

    [2] Ren Hao, Wang Qiaobin, Luo Yuqiang, Li Kangye. Wide-Band Spectrum Optical Film Thickness Monitoring System with Compound Light Path[J]. Laser & Optoelectronics Progress, 2010, 47(5): 53101

    [3] Li Chunxi, Deng Huaqiu, Ren Hao. Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness[J]. Laser & Optoelectronics Progress, 2011, 48(12): 123101

    [4] Tan Wei, Luo Jianfeng, Liu Jun, Shen Dingyi, Zen Wenfeng. The Study of Temperature Distribution of Optic System in the Star Sensor[J]. Acta Optica Sinica, 2009, 29(s1): 231

    [5] HAN Jun, WANG Song, SHANG Xiao-yan, AN Yu-ying. Spectrum Signal of Random Noise Processing in the Thin-film Wideband Monitoring System[J]. Acta Photonica Sinica, 2009, 38(5): 1202

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese]. Autocontrol Technology of Optical Thin-film Manufacture Based on In-situ Broadband Optical Monitor[J]. Acta Photonica Sinica, 2004, 33(9): 1136

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Sep. 2, 2003

    Accepted: --

    Published Online: Sep. 17, 2007

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology