Acta Photonica Sinica, Volume. 33, Issue 9, 1136(2004)

Autocontrol Technology of Optical Thin-film Manufacture Based on In-situ Broadband Optical Monitor

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    References(4)

    [1] [1] Pulker H K.Coatings on Glass.ElSEVIER,Amsterdam-Oxford-New York-Tokyo,1984,306~307

    [2] [2] Vidal B,Fronier A,Pelletier E.Wideband optical monitoring of nonquarterwave multilayer filters.Appl Opt, 1979,18(22):3851

    [4] [4] Telemark Co.Ltd,Model OM820 in-situ spectroscopic optical monitor user′s guide,2000

    [5] [5] Sainty W G,Sainty D W.Multiwavelength monitoring of thin film growth using a fiber spectrometer.Proceedings of SPIE, 2000,4094:31~37

    CLP Journals

    [1] Shang Xiaoyan, Han Jun, Jiang Xu. Merit Function Correction Technology of Thin-Film Thickness Wideband Monitoring System[J]. Laser & Optoelectronics Progress, 2012, 49(2): 23101

    [2] Ren Hao, Wang Qiaobin, Luo Yuqiang, Li Kangye. Wide-Band Spectrum Optical Film Thickness Monitoring System with Compound Light Path[J]. Laser & Optoelectronics Progress, 2010, 47(5): 53101

    [3] Li Chunxi, Deng Huaqiu, Ren Hao. Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness[J]. Laser & Optoelectronics Progress, 2011, 48(12): 123101

    [4] Tan Wei, Luo Jianfeng, Liu Jun, Shen Dingyi, Zen Wenfeng. The Study of Temperature Distribution of Optic System in the Star Sensor[J]. Acta Optica Sinica, 2009, 29(s1): 231

    [5] HAN Jun, WANG Song, SHANG Xiao-yan, AN Yu-ying. Spectrum Signal of Random Noise Processing in the Thin-film Wideband Monitoring System[J]. Acta Photonica Sinica, 2009, 38(5): 1202

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    [in Chinese], [in Chinese], [in Chinese]. Autocontrol Technology of Optical Thin-film Manufacture Based on In-situ Broadband Optical Monitor[J]. Acta Photonica Sinica, 2004, 33(9): 1136

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    Paper Information

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    Received: Sep. 2, 2003

    Accepted: --

    Published Online: Sep. 17, 2007

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