Fig. 1. SOI rib waveguide structure and test image

Fig. 2. Propagation losses test of three SOI waveguides and the responses of F-P cavity formed by the waveguide channel to temperature change， where the lower temperature ranges are 20 ℃~35 ℃， the high temperature range are 30 ℃~45 ℃

Fig. 3. The relation between the relative error of Fresnel reflection coefficient and the effective refractive index of guided wave mode.

Fig. 4. The influence of the maximum and minimum relative error of SOI waveguide F-P cavity response to temperature change on extinction ratio relative error

Fig. 5. The measurement accuracy of SOI waveguide transmission loss and the extinction ratio of F-P cavity output value correspond to three different reflectivity error values