Optics and Precision Engineering, Volume. 28, Issue 7, 1433(2020)
Research progress of surface acoustic wave ultraviolet detectors
Ultraviolet (UV) detectors based on the Surface Acoustic Wave (SAW) technology have become an active field of research owing to their advantages such as fast response, high sensitivity, simple fabrication, and wireless passive monitoring. In this study, the progress in the research of SAW UV detection, based on the classification of UV-sensitive films, was reviewed. The sensitive mechanism of SAW UV detection was analyzed and the characteristics, preparations, and UV performances of gallium nitride, doped gallium nitride, zinc oxide, doped zinc oxide, nanostructured zinc oxide, aluminum nitride, and other sensitive membrane materials were presented. This work also demonstrated the latest advancements in SAW UV sensors and their prospects in future development trends and challenges.
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YIN Chang-shuai, ZHOU Jian, LIU Yi, WU Jian-hui, XIONG Shuo, DUAN Hui-gao. Research progress of surface acoustic wave ultraviolet detectors[J]. Optics and Precision Engineering, 2020, 28(7): 1433
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Received: Nov. 4, 2019
Accepted: --
Published Online: Nov. 2, 2020
The Author Email: Chang-shuai YIN (yin.CS@foxmail.com)