Chinese Optics Letters, Volume. 11, Issue s1, S10213(2013)

Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates

Cunding Liu, Chun Guo, Mingdong Kong, and Bincheng Li
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Cunding Liu, Chun Guo, Mingdong Kong, Bincheng Li. Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates[J]. Chinese Optics Letters, 2013, 11(s1): S10213

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Paper Information

Category: Deposition and process control

Received: Dec. 24, 2012

Accepted: Jan. 15, 2013

Published Online: May. 30, 2013

The Author Email:

DOI:10.3788/col201311.s10213

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