Infrared and Laser Engineering, Volume. 35, Issue 3, 351(2006)

Design of hybrid refractive-diffractive f-θ lens working on CO2 laser drilling system

[in Chinese]1,*... [in Chinese]1, [in Chinese]1, [in Chinese]1 and [in Chinese]2 |Show fewer author(s)
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    References(5)

    [2] [2] EHRMANN J S.Optics for vector scanning[C]// Proceedings of SPIE,1991,1454:245-255.

    [3] [3] WHITMAN T L,ARAGHI M N.Electronic f-theta correction for hologon deflector systems[C]//Proceedings of SPIE,1991,1454:426-433.

    [4] [4] TAKASHI A,HIDEAKI I,KOJI Y,et al.Development of f-θ lens for CO2 laser drilling system[J].SEI Technical Review,2000,49:135-141.

    [7] [7] MISSING M D,MORRIS G M.Diffractive optics applied to eyepiece design[J].Appl Opt,1995,34:2452-2461.

    [8] [8] KEIJI F,TAKESHI O,KEIJI E.Diffractive/refractive hybrid f-θ lens for laser drilling of multilayer printed circuit boards[C]//Proceedings of SPIE,2002,4830:95-100.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design of hybrid refractive-diffractive f-θ lens working on CO2 laser drilling system[J]. Infrared and Laser Engineering, 2006, 35(3): 351

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    Paper Information

    Category: 光学技术及应用

    Received: May. 17, 2005

    Accepted: Aug. 11, 2005

    Published Online: Oct. 20, 2006

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