Semiconductor Optoelectronics, Volume. 44, Issue 1, 44(2023)
Infrared Absorption Analysis of Microbolometer with Two-Layer Umbrella-Shaped Openings
References(2)
[5] [5] Yutaka Tanaka, Akio Tanaka, Kiyoshi Lida, et al. Performance of 320×240 uncooled bolometer type infrared focal plane arrays［J］. Proc. SPIE, 2003, 5074: 414-424.
[11] [11] Howard P E, Clarke J E. DRS U6000 640×480 VOX uncooled IR focal plane［J］. Proc. SPIE, 2002, 4721: 48-55.
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JIANG Junxian, WANG Tao, CHEN Chao, WU Zhiming, WANG Jun. Infrared Absorption Analysis of Microbolometer with Two-Layer Umbrella-Shaped Openings[J]. Semiconductor Optoelectronics, 2023, 44(1): 44
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Received: Aug. 22, 2022
Accepted: --
Published Online: Apr. 7, 2023
The Author Email: Chao CHEN (chenchao@uestc.edu.cn)
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