Fig. 1. Schematic diagram of generalized ellipsometer

Fig. 2. Structure diagram of variable angle mechanism of ellipsometer driven by single motor

Fig. 3. Structure diagram of synchronous gear

Fig. 4. Schematic of variable angle collimation optical path

Fig. 5. Simulation position diagram of variable angle of ellipsometer driven by single motor

Fig. 6. Simulation motion curves of variable angle of ellipsometer driven by single motor

Fig. 7. Light intensity of air samples measured by ellipsometer driven by single motor