Acta Photonica Sinica, Volume. 52, Issue 6, 0631003(2023)

Investigation on the Preparation of TiO2∶Al2O3 Nanocomposite Film Applied to the Conductive Layer of Microchannel Plate

Jichao LI1...2, Xiangping ZHU1,2, Xiangxin LI3, Jingpeng HU3, Cunyu LI1,2, and Wei ZHAO12,* |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechnics, Chinese Academy of Sciences, Xi'an 710119, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Xi'an Zhongke Atomic Precision Manufacturing Technology Co., Ltd., Xi'an 710110, China
  • show less
    Figures & Tables(9)
    Pulse schematic of TiO2∶Al2O3 nanocomposite film by atomic layer deposition
    Structure of TiO2∶Al2O3 nanocomposite film
    Periodic arrangement diagram of microchannel plate array
    MCP single channel conductive layer expansion diagram
    Relationship between TiO2 cycle percentage and film square resistance
    SEM images of TiO2:Al2O3 Nanocomposite film
    Bulk resistance of MCP under different voltages
    The gain and the voltage of ALD-MCP
    • Table 1. ALD experimental parameters of TiO2∶Al2O3 nanocomposite film

      View table
      View in Article

      Table 1. ALD experimental parameters of TiO2∶Al2O3 nanocomposite film

      SubstrateTiO2∶Al2O3TiO2%TDMAT/N2/H2O/N2/sTMA/N2/H2O/N2/s
      Borosilicate1∶910%1/15/1/151/8/1/8
      1∶420%
      3∶730%
      2∶340%
      3∶260%
      4∶180%
      Si10∶2033%1/15/1/151/8/1/8
      MCP10∶2033%2/15/2/152/8/2/8
    Tools

    Get Citation

    Copy Citation Text

    Jichao LI, Xiangping ZHU, Xiangxin LI, Jingpeng HU, Cunyu LI, Wei ZHAO. Investigation on the Preparation of TiO2∶Al2O3 Nanocomposite Film Applied to the Conductive Layer of Microchannel Plate[J]. Acta Photonica Sinica, 2023, 52(6): 0631003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Feb. 17, 2023

    Accepted: Mar. 27, 2023

    Published Online: Jul. 27, 2023

    The Author Email: ZHAO Wei (weiz@opt.ac.cn)

    DOI:10.3788/gzxb20235206.0631003

    Topics