Optics and Precision Engineering, Volume. 28, Issue 4, 759(2020)
Development of high-precision multivariable measurement and control system of ultrasonic motor
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CHEN Ning, ZHENG Jie-ji, JIAO Xi-kai, FAN Shi-xun, CHEN Hu-cheng, FAN Da-peng. Development of high-precision multivariable measurement and control system of ultrasonic motor[J]. Optics and Precision Engineering, 2020, 28(4): 759
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Received: Mar. 4, 2020
Accepted: --
Published Online: Jul. 2, 2020
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