Researching | Hammerstein modeling and feedback linearization control for piezoelectric positioning stage

Optics and Precision Engineering, Volume. 30, Issue 14, 1716(2022)

Hammerstein modeling and feedback linearization control for piezoelectric positioning stage

Tao HUANG1... Zhihong LUO1, Guibao TAO1,* and Mingxiang LING2,* |Show fewer author(s)

Author Affiliations

¹College of Mechanical and Vehicle Engineering， Chongqing University， Chongqing400044， China

²Institute of Systems Engineering， China Academy of Engineering Physics， Mianyang61999， China

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Figures&Tables (11)

References (21)

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Figures & Tables(11)

Fig. 1. Piezoelectric positioning stage

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Fig. 2. Hysteresis curves of piezoelectric positioning stage

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Fig. 3. Structure of Hammerstein model

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Fig. 4. Block diagram of input-output feedback linearization control strategy

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Fig. 5. Experimental setup

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Fig. 6. Model verification of 10 Hz， 50 Hz and 100 Hz

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Fig. 7. Tracking control results of 10 Hz， 50 Hz and 100 Hz

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Fig. 8. Tracking control of composite signal

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Table 1. Parameters of Hammerstein model
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Table 1. Parameters of Hammerstein model
模型参数值模型参数值
$a_{0}$ 0.392 3 $a_{5}$ 0.074 5
$a_{1}$ 0.159 6 $a_{6}$ -0.042 1
$a_{2}$ -0.004 3 $m_{1}$ -2.633e-06
$a_{3}$ 0.073 6 $ζ$ 0.547 8
$a_{4}$ 0.010 4 $ω$ 10 473

Table 2. Model error
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Table 2. Model error
频率/Hz 10 20 50 80 100
RMSE/μm 0.475 7 0.389 5 0.340 6 0.316 9 0.326 0

Table 3. Root mean square errors of three control methods

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Table 3. Root mean square errors of three control methods

输入信号频率/Hz	控制方法	RMSE/μm
10	MRPI Feedforward	0.544 4
	MRPI Feedforward+PID	0.201 9
	IOFL	0.154 6
50	MRPI Feedforward	1.298 5
	MRPI Feedforward+PID	0.619 9
	IOFL	0.498 1
100	MRPI Feedforward	4.934 7
	MRPI Feedforward+PID	1.723 8
	IOFL	0.926 6

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Tao HUANG, Zhihong LUO, Guibao TAO, Mingxiang LING. Hammerstein modeling and feedback linearization control for piezoelectric positioning stage[J]. Optics and Precision Engineering, 2022, 30(14): 1716

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Paper Information

Category: Micro/Nano Technology and Fine Mechanics

Received: Apr. 7, 2022

Accepted: --

Published Online: Sep. 6, 2022

The Author Email: TAO Guibao (gbtao@cqu.edu.cn), LING Mingxiang (gbtao@cqu.edu.cn)

DOI:10.37188/OPE.20223014.1716

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology