Optics and Precision Engineering, Volume. 30, Issue 14, 1716(2022)
Hammerstein modeling and feedback linearization control for piezoelectric positioning stage
A piezoelectric positioning stage is driven and amplified by piezoelectric ceramic and flexible hinges, which can provide high positioning accuracies and response speeds. Thus, it is widely used in various precision/ultra-precision positioning fields. However, the primary challenge presented by the piezoelectric positioning stage is the inherent hysteresis nonlinear characteristics of piezoelectric ceramics, which significantly affects the positioning and tracking accuracy of the piezoelectric positioning stage. Hence, a hysteresis modeling method based on the Hammerstein structure and an input-output feedback linearization control strategy is proposed herein. First, hysteresis modeling based on the Hammerstein structure is proposed, and the parameters are estimated. Subsequently, based on the Hammerstein model, a tracking controller is designed via an input–output feedback linearization control strategy. Finally, the proposed Hammerstein model and the designed tracking controller are experimentally verified on a piezoelectric positioning stage. The experimental results of model identification reveal that the proposed Hammerstein model can effectively fit the hysteresis nonlinearity between the input and output of the piezoelectric positioning stage and that its root mean square error is less than 0.5 μm. Meanwhile, the experimental results of trajectory tracking indicate that the designed tracking controller can track the desired signal (amplitude 60 μm; frequency 100 Hz) with a root mean square error of 0.926 6 μm. Compared with the feedforward compensation tracking control based on the modified rate-dependent Prandtl-Ishlinskii (MRPI) model and the compound tracking control of feedforward compensation based on the MRPI model and proportional-integral-derivative feedback, the proposed model offers an accuracy improvement of 81.22% and 46.25%, respectively.
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Tao HUANG, Zhihong LUO, Guibao TAO, Mingxiang LING. Hammerstein modeling and feedback linearization control for piezoelectric positioning stage[J]. Optics and Precision Engineering, 2022, 30(14): 1716
Category: Micro/Nano Technology and Fine Mechanics
Received: Apr. 7, 2022
Accepted: --
Published Online: Sep. 6, 2022
The Author Email: TAO Guibao (gbtao@cqu.edu.cn), LING Mingxiang (gbtao@cqu.edu.cn)