Fig. 1. Initial surface error distribution

Fig. 2. (a) 3D and (b) 2D shapes of magnetorheological finishing removing function

Fig. 3. Spiral trajectory

Fig. 4. Initial surface

Fig. 5. Spiral polishing rear shape

Fig. 6. PSD analysis of the (a) x direction and (b) y direction before and after the spiral polishing

Fig. 7. Grating trajectory

Fig. 8. Initial surface

Fig. 9. Raster line processing rear shape

Fig. 10. PSD analysis in the (a) x direction and (b) y direction before and after the grating line polishing

Fig. 11. (a) Before and (b) after polishing with raised spiral matrix trajectory processing

Fig. 12. PSD analysis of the width screw matrix trajectory (a) x direction (b) y direction PSD analysis