Acta Photonica Sinica, Volume. 36, Issue 6, 1097(2007)

Properties of Silicon Nitride Films Deposited by Radio Frequency Plasma Enhanced Chemical Vapour Deposition

[in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    References(5)

    [2] [2] NAGEL H,SCHMIDT J,ABERLE A G,et al.Exceptionally high bulk minority-carrier lifetime in block-cast multicrystalline silicon[C].Proceedings of the 14th European Photovoltaic Solar Energy Conference,Stephens,Bedford,1997:762-765.

    [3] [3] ABERLE A G.Overview on SiN surface passivation of crystalline silicon solar cells[J].Solar Energy Materials & Solar Cells,2001,65(1):239 -248.

    [7] [7] SOPORI B,DENG X,BERNNER J P,et al.Hydrogen in silicon:A discussion of diffusion and passivation mechanisms[J].Solar Energy Materials & Solar Cells,1996,41 (1-4):159-169.

    [8] [8] ROHATGI A,YELUNDUR V,JEONG J,et al.Fundamental understanding and implementation of al-enhanced PECVD SiNx hydrogenation in silicon ribbons[J].Solar Energy Materials & Solar Cells,2002,74(1-4):117-126.

    [9] [9] RAY S K,DAS K,MAITI C K,et al.Effect of reactive-ion bombardment on the properties of silicon nitride and oxynitride films deposited by ion-beam sputtering[J].Journal of Applied Physics,1994,75(12):8145-8152.

    CLP Journals

    [1] ZHANG Wei, GENG Yu, HOU Chang-lun, YANG Guo-guang. Grating Light Valve′s Structure Improvement and Its Manufacture Technology[J]. Acta Photonica Sinica, 2009, 38(8): 1926

    [2] SUN Qing-yu, SUN Zhe-yu, XING Wen-chao, SUN De-gui. Preparation Process and Stress Study of Ge-doped Silica Film Waveguide[J]. Acta Photonica Sinica, 2018, 47(12): 1231003

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese]. Properties of Silicon Nitride Films Deposited by Radio Frequency Plasma Enhanced Chemical Vapour Deposition[J]. Acta Photonica Sinica, 2007, 36(6): 1097

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Apr. 2, 2006

    Accepted: --

    Published Online: Sep. 17, 2007

    The Author Email:

    DOI:

    Topics