[1] [1] WANG G M,YAO ZH Q ,MA L SH ,et al..High precision friction drive of large telescope ［J］.Opt.Precision Eng.,2004，12(6)：592-596.(in Chinese)

[2] [2] ZHANG W M，DENG W H.Design of two-axis calibration rotating plarm for high preeision star sensor［J］.OPto-Electronie Engineering, 1999,26(12):107-111.(in Chinese)

[3] [3] JI W，LI Q，YANG H Fet al..Design and servo control for precision opto-electronic tracking turntable［J］.Opto-Electronie Engineering,2006,33(3):12-16.(in Chinese)

[4] [4] TANG S.Schematic design of macro-micro rotary table and development of micro driving circuit［D］.Harbin Institute of Technology， 2006.(in Chinese)

[5] [5] LI SH Y,HUANG CH ZH,WANG G L.Study on micro motion mechanism［J］.Aviation Precision Manufacturing Technogy，2000，36(4):5-9.(in Chinese)

[6] [6] LIU ZH B.Study on micro-motion technolygy［D］.Changchun University of Science and Technology，2007 .(in Chinese)

[7] [7] HEUI J P ,SUN GL D，Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation ［J］ .International Journal of Machine Tools & Manufacture，2001(41):51-63.

[8] [8] JIE D G , LIU Y J , SUN L M, et al..Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism ［J］.Opt.Precision Eng.,2005,13(2)：171-178.(in Chinese)

[9] [9] SHI X M，LI Y M.Precision Machine Design［M］.Shanghai：Shanghai Science and Technology Press，1987.(in Chinese)

[10] [10] ZHENG D.Design Basic of Machine-electron Integration［M］.Beijing：China Machine Press，2001.(in Chinese)