Acta Photonica Sinica, Volume. 51, Issue 11, 1112003(2022)
Phase Shift Error Analysis of a Phase-shifting Interference Algorithm with Small Phase Step Size
[1] SCHWIDER J. Phase shifting interferometry: reference phase error reduction[J]. Applied Optics, 28, 3889-3892(1989).
[2] KINNSTAETTER K, LOHMANN A W, SCHWIDER J et al. Accuracy of phase shifting interferometry[J]. Applied Optics, 27, 5082-5089(1988).
[3] WANG Zhaoyang, HAN B. Advanced iterative algorithm for phase extraction of randomly phase shifted interferograms[J]. Optics Letter, 29, 1671-1673(2004).
[4] JESUS M M, FRANCISCO J C R, FRANCISCO G P L et al. Phase recovery from interferograms under high amplitude vibrations[J]. Optics Express, 22, 31387-31395(2014).
[5] LIU Qian, WANG Yun, JI Fang et al. Vibration-insensitive phase-shifting interferometry based on frequency domain analysis[J]. Optics and Precision Engineering, 23, 252-259(2015).
[6] LU Wenqian, LI Jianxin, DUAN Mingliang et al. Anti-vibration interferometric shape measurement based on tilt phase[J]. Acta Optica Sinica, 41, 106-112(2021).
[7] HUANG Genwang. Research on Fizeau phase-shifting laser interferometer[D](2011).
[8] DECK L L, GROOT P J D E. Numerical simulations of vibration in phase-shifting interferometry[J]. Applied Optics, 35, 2172-2178(1996).
[9] GROOT P J DE. Vibration in phase-shifting interferometer[J]. Journal of The Optical Society of America A, 12, 354-365(1995).
[10] ESTRADA J C, SERVIN M, QUIROGA J A. A self-tuning phase-shifting algorithm for interferometry[J]. Optics Express, 18, 2632-2638(2010).
[11] HARIHARAN P, OREB B F, EIJU T. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm[J]. Applied Optics, 26, 2504-2506(1987).
[12] MALACARA, DANIEL[M]. Optical shop testing(2007).
[13] LIU Fengwei. Study of key technology of random phase shifting interferometry[D](2017).
[14] ZHENG Junli, YING Qiheng, YANG Weili[M]. Signal and system(2000).
[15] MOSINO J F, SERVIN M, ESTRADA J C et al. Phasorial analysis of detuning error in temporal phase shifting algorithms[J]. Optics Express, 17, 5618-5623(2009).
[16] ZHU Rihong, CHEN Jinbang, WANG Qing et al. A new algorithm on phase shifting interferometry: the overlapping averaging 4-frame algorithm[J]. Acta Optica Sinica, 14, 1288-1293(1994).
Get Citation
Copy Citation Text
Roujing CHEN, Sen HAN, Yanhui KANG, Chunfeng XU, Xueyuan LI. Phase Shift Error Analysis of a Phase-shifting Interference Algorithm with Small Phase Step Size[J]. Acta Photonica Sinica, 2022, 51(11): 1112003
Category: Instrumentation, Measurement and Metrology
Received: Jan. 25, 2022
Accepted: Apr. 13, 2022
Published Online: Dec. 13, 2022
The Author Email: Sen HAN (senhanemail@126.com)