[1] [1] WANG Y, NI Y,YU J CH. Computer- controlled polishing technology for small aspheric lens［J］. Opt. Precision Eng., 2007, 15(6):1527-1533.(in Chinese)

[2] [2] MA ZH L, GU Y Q,PENG L R,et al.. Ultra-gradient mirror figuring by 5-Axis ion beam［J］. Acta Optica Sinica,2015, 35(6):0622001.(in Chinese)

[3] [3] YANG H, HE J G, HUANG W, et al..Dynamic prediction of the shape of MRF removal function［J］. High Power Laser and Particle Beams,2015,27(9):092011.(in Chinese)

[4] [4] BURGE J H. Mirror technologies for giant telescope［Z］. The University of Arizona Tucson.

[5] [5] XU G, DAI Y T, XIAO X.Study on mathematical modeling and experiment of ultrashort laser polishing micro-processing ［J］. Chinese Journal Of Lasers, 2013,40(6):0603003.(in Chinese)

[6] [6] SONG C.Study on the key technologies of manetorheological finishing for off-axis asphere optical elements［D］. Changsha:National University of Defence Technology,2012.(in Chinese)

[7] [7] WANG C,WANG Z,YANG X,et al..Modeling of the static tool influence function of bonnet polishing based on FEA［J］. Int J Adv Manuf Technol.,2014, 74(1-4):341-349.

[8] [8] NIE X Q, LI SH Y,SHI F,et al..Generalized numerical pressure distribution model for smoothing polishing of irregular midspatial frequency errors［J］. Applied Optics,2014,53(6):1020-1027.

[9] [9] DONG ZH CH,CHEN H B, TAM H Y. Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated material removal rate［J］. Applied Optics,2014,53(11):2455-2464.

[10] [10] Dae Wook Kim, James H.BurgeRigid conformal polishing tool using non-linear viscro-elastic effect［J］.Optics Express.2010,Vol.18,No.3.

[11] [11] XUE Q,MA SH J,TONG ZH N.Theory of Elasticity［M］.Beijing:Peking University Press,2006,37-38.(in Chinese)

[12] [12] LI SH Y,DAI Y F.New Technology for Manufacturing and Measurement of Large and Middle scale Aspheric Surface［M］. Beijing:National Defence Industy Press,2011,99-100.(in Chinese)