[6] [6] SELVAKUMAR A, YAZDI N, KHALIL N. A wide-range micromachined threshold accelerometer array and interface circuit[J]. Journal of Micromechanics and Microengineering, 2001,11(2):118. doi:10.1088/0960-1317/11/2/306.

[7] [7] NIE Weirong, ZHOU Zhijian, XI Zhanwen A novel dual-threshold MEMS acceleration latching switch[C]// 2017 IEEE International Symposium on Inertial Sensors and Systems. Kauai,HI: IEEE, 2017:54-57. doi:10.1109/ISISS.2017.7935667.

[8] [8] ZHAO Jian,GAO Renjing,CHEN Guoxi,et al. Nonlinear coupling mechanical model for large stroke magnetic-based multistable mechanisms[J]. Mechanism and Machine Theory, 2015(83):56-68. doi:10.1016/j.mechmachtheory.2014.09.004.

[9] [9] ZHAO Jian,HUANG Yu,GAO Renjing,et al. Dynamics of a bistable mechanism with parallel beams and permanent magnets[J]. Advanced Materials Research, 2011(308/310):508-512. doi:10.4028/www.scientific.net/AMR.308-310.508.

[10] [10] JIA Mengjun,LI Xinxin,SONG Zhaohui. Micro-cantilever shocking-acceleration switches with threshold adjusting and'on'-state latching functions[J]. Journal of Micromechanics and Microengineering, 2017,17(3):567. doi:10.1088/0960-1317/17/3/020.

[11] [11] WANG Yue, ZHI Chao, TANG Bin, et al. A micro electromagnetic actuator with high force density[J]. Sensors and Actuators A: Physical, 2021(331):112771. doi:10.1016/j.sna.2021.112771.