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Acta Optica Sinica, Volume. 39, Issue 4, 0412013(2019)

Interferometric Projection Fourier Transform Profilometry Based on Cube Beam Splitting Prism

Xiaoyan Li1, Yongfu Wen1,2、*, Haobo Cheng1,2、*, Hengyu Wu1, and Huaying Wang2
Author Affiliations
  • 1 School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2 Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen, Guangdong 518057, China
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    Xiaoyan Li, Yongfu Wen, Haobo Cheng, Hengyu Wu, Huaying Wang. Interferometric Projection Fourier Transform Profilometry Based on Cube Beam Splitting Prism[J]. Acta Optica Sinica, 2019, 39(4): 0412013

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 7, 2018

    Accepted: Dec. 25, 2018

    Published Online: May. 10, 2019

    The Author Email:

    DOI:10.3788/AOS201939.0412013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology