Optics and Precision Engineering, Volume. 19, Issue 11, 2651(2011)
Design of AFM system with high speed and large scanning range
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YIN Bo-hua, CHEN Dai-xie, LIN Yun-sheng, CHU Ming-zhang, HAN Li. Design of AFM system with high speed and large scanning range[J]. Optics and Precision Engineering, 2011, 19(11): 2651
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Received: Jan. 22, 2011
Accepted: --
Published Online: Dec. 5, 2011
The Author Email: Bo-hua YIN (yinbh@mail.iee.ac.cn)
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