Researching | Fabrication and enhanced optical absorption of submicrometer pits array on 6H-SiC via two-beam interference of femtosecond laser

Chinese Optics Letters, Volume. 8, Issue 12, 1203(2010)

Fabrication and enhanced optical absorption of submicrometer pits array on 6H-SiC via two-beam interference of femtosecond laser

Yi Zhang, Xin Jia, Pingxin Xiong, and Tianqing Jia

Author Affiliations

State Key Laboratory of Precision Spectroscopy, Department of Physics, East China Normal University, Shanghai 200062, China

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References (19)

Paper Information

References(19)

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[1] Zehua Wu, Nan Zhang, Mingwei Wang, Xiaonong Zhu. Femtosecond laser ablation of silicon in air and vacuum[J]. Chinese Optics Letters, 2011, 9(9): 093201

[2] Yudong Li, Xiangyang Gao, Meiling Jiang, Qian Sun, Jianguo Tian. Fabrication of magneto-optical microstructure by femtosecond laser pulses[J]. Chinese Optics Letters, 2012, 10(10): 102201

[3] Xin Jia, Yanhong Yuan, Dangqiang Yang, Tianqing Jia, Zhenrong Sun. Ultrafast time-resolved imaging of femtosecond laser-induced periodic surface structures on GaAs[J]. Chinese Optics Letters, 2014, 12(11): 113203

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[4] Gao Ren-Xi, Gao Sheng-Ying, Fan Guang-Hua, Liu Jie, Wang Qiang, Zhao Hai-Feng, Qu Shi-Liang. Enhancement of surface photoconductivityin 6H-silicon carbide crystal modified by femtosecond laser pulse irradiation. Acta Physica Sinica, 63, 067801(2014).

[5] Yi-Hsien Liu, Kong-Kai Kuo, Chung-Wei Cheng, An-Chen Lee. Femtosecond laser two-beam interference applied to 4H-SiC surface hierarchical micro-nano structure fabrication. Optics & Laser Technology, 151, 108081(2022).

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[7] Binbin Meng, Jian Zheng, Dandan Yuan, Shaolin Xu. Machinability improvement of silicon carbide via femtosecond laser surface modification method. Applied Physics A, 125, 69(2019).

[8] Yuzhen Tian, Jin Guo, Rui Wang, Tingfeng Wang. Mathematic model analysis of Gaussian beam propagation through an arbitrary thickness random phase screen. Optics Express, 19, 18216(2011).

[9] Xiaoping Ouyang, Jingui Ma, Lin Yang, Shunxing Tang, Chong Liu, Yonghua Peng, Liejia Qian, Baoqiang Zhu, Jianqiang Zhu, Zunqi Lin. Accuracy of single-shot autocorrelation measurements of petawatt laser pulses. Applied Optics, 51, 3989(2012).

[10] Chengwu Wang, Syuhei Kurokawa, Julong Yuan, Li Fan, Huizong Lu, Zhe Wu, Weifeng Yao, Kehua Zhang, Yu Zhang, Toshiro Doi. Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate. International Journal of Automation Technology, 12, 187(2018).

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Yi Zhang, Xin Jia, Pingxin Xiong, Tianqing Jia. Fabrication and enhanced optical absorption of submicrometer pits array on 6H-SiC via two-beam interference of femtosecond laser[J]. Chinese Optics Letters, 2010, 8(12): 1203

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Paper Information

Received: Jun. 24, 2010

Accepted: --

Published Online: Dec. 21, 2010

The Author Email:

DOI:10.3788/COL20100812.1203

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology