Researching |

Optics and Precision Engineering, Volume. 12, Issue 5, 480(2004)

[in Chinese]

[in Chinese]... [in Chinese], [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)

Author Affiliations

[in Chinese]

show less

Abstract Get PDF

Figures&Tables (0)

Paper Information

References(3)

[5] [5] HOGREFE H, GIESENBERG D, HAELBICH R P. A New VUV-reflectometer for UHV-applications[J].Nuclear Instruments and Methods, 1983,208:415-418.

[6] [6] MIHIRO Y. Soft x-ray reflection from SiC, TiC, and WC mirrors[J].Appl. Opt. ,1986,25(24):4586-4590.

[7] [7] FUCHSchs D. HIGH precision soft x-ray reklectmeter[J].Rev. Sci. Instrum ,1995,66(2):2248-2250.

CLP Journals

[1] Zhou Hongjun, Wang Guanjun, Zheng Jinjin, Hou Tonglin, Qiu Keqiang. Suppression of HigherOrder Harmonics by Different Filter in 5~40 nm[J]. Acta Optica Sinica, 2010, 30(9): 2753

[2] Zhou Hong-jun, Wang Guan-jun, Zheng Jin-jin, Huo Tong-lin. Triple reflector polarizer integrated with suppression of higher order harmonics[J]. Optics and Precision Engineering, 2011, 19(10): 2314

[3] HE Ling-ping, CHEN Bo, ZHANG Hong-ji, LIU Shi-jie, WANG Xiao-guang. Radiation calibration of EUV space cameras[J]. Optics and Precision Engineering, 2016, 24(5): 1036

[4] ZHOU Hong-jun, XIA Xuan-zhi, HUO Tong-lin, ZHENG Jin-jin. Distribution and suppression of higher-order harmonics of metrology beamline in 5～140 nm[J]. Optics and Precision Engineering, 2016, 24(7): 1550

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2004, 12(5): 480

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category:

Received: Jul. 22, 2004

Accepted: --

Published Online: Nov. 3, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology