Optics and Precision Engineering, Volume. 17, Issue 5, 1033(2009)

Different pressure microflow sensors based on Lamb waves

JIA Hong-guang1,*... GUANG Ling-ling1,2, MANCEAU Jean-Francois3, BASTIEN Francois3 and LIU Bo1 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less
    References(13)

    [1] [1] YIN Z Z,HU W L,GUO Z Y. Review on microflow devices and systems[J]. Fluid Machinery,2000,28(4): 33-36.(in Chinese)

    [2] [2] BOILLAT M A ,WIELA J,HOOGERWERF A C,et al.. A differential pressure liquid flow sensor for flow regulation and dosing systems [C]. IEEE Micro Electro Mechanical Systems,1995,MEMS '95,Proceedings: 350-352.

    [3] [3] NGUYEN N T,WERELEY S T. Fundamentals and Applications of Microfluidics [M]. London: Artech House,2002.

    [4] [4] NGUYEN N T. Micromachined flow sensors—a review [J]. Flow Measurement and Instrumentation,1997,8(1):7-16.

    [5] [5] ELWENSPOEK M. Thermal flow micro sensors [J].IEEE,Semiconductor Conference,1999,2(2):423-435.

    [6] [6] WEI Z W,QIN M,HUANG Q A. Non-thermal micro flowmeters [J]. Chinese Journal of Electron Devices,2006,29(4):1065-1070. (in Chinese)

    [7] [7] WENZEL S W,WHITE R M. Silicon-based ultrasonic Lamb-wave multisensors[J]. IEEE Solid-State Sensor and Actuator Workshop,1988:27-30.

    [8] [8] BUFF W,RUSKO M,GOROLL E,et al.. Universal pressure and temperature SAW sensor for wireless applications [J]. IEEE,Ultrasonics Symposium,1997:359-362.

    [9] [9] JIA H,DUHAMEL R,MANCEAU J F,et al.. Improvement of Lamb waves sensors: temperature sensitivity compensation [J]. Sensors and Actuators A,2005,121:321-326.

    [11] [11] VELLEKOOP M J,LUBKING G W,SARRO P M,et al. Integrated-circuit- compatible design and technology of acoustic-wave-based microsensors [J]. Sensors and Actuators A,Physical,1994,44:249-263.

    [12] [12] WANG F J. Computational Fluid Dynamics Analysis—Principle and Application of CFD Software [M]. Beijing: Tsinghua University Press,2004. (in Chinese)

    [13] [13] FEI Y T. Error Theory and Date Process [M].Beijing: Machinery Industry Press,2004. (in Chinese)

    CLP Journals

    [1] KONG Hui, LI Chuan-yu, ZHOU Lian-qun, YAO Jia, TANG Yu-guo, GUO Zhen, ZHANG Wei. A method for fluid velocity vector measurement using thin film Lamb wave resonator[J]. Optics and Precision Engineering, 2017, 25(1): 155

    Tools

    Get Citation

    Copy Citation Text

    JIA Hong-guang, GUANG Ling-ling, MANCEAU Jean-Francois, BASTIEN Francois, LIU Bo. Different pressure microflow sensors based on Lamb waves[J]. Optics and Precision Engineering, 2009, 17(5): 1033

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Aug. 29, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Hong-guang JIA (jiahg@ciomp.ac.cn)

    DOI:

    CSTR:32186.14.

    Topics