Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering

Kun Chen; Huanfeng Zhu; Xinyu Yi; Shuai Cheng; Jing Li; Songyou Wang; Ming Lu; Min Xu; Li Ma; Lei Lü

doi:10.3788/COL201513.103101

Chinese Optics Letters, Volume. 13, Issue 10, 103101(2015)

Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering

Kun Chen¹, Huanfeng Zhu¹, Xinyu Yi¹, Shuai Cheng¹, Jing Li^1,2、*, Songyou Wang^1,2, Ming Lu^1,2, Min Xu^1,2, Li Ma³, and Lei Lü⁴

Author Affiliations

¹Department of Optical Science and Engineering, Fudan University, Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Shanghai 200433, China

²Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education), Shanghai 200433, China

³College of Physical Science and Engineering, Tongji University, Shanghai 200092, China

⁴Department of Medical Physics, Weifang Medical University, Shandong 261053, China

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Kun Chen, Huanfeng Zhu, Xinyu Yi, Shuai Cheng, Jing Li, Songyou Wang, Ming Lu, Min Xu, Li Ma, Lei Lü. Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering[J]. Chinese Optics Letters, 2015, 13(10): 103101

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Paper Information

Category: Thin films

Received: Apr. 18, 2015

Accepted: Aug. 19, 2015

Published Online: Sep. 13, 2018

The Author Email: Jing Li (lijing@fudan.edu.cn)

DOI:10.3788/COL201513.103101

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology