Journal of Semiconductors, Volume. 45, Issue 7, 072302(2024)

Reconfigurable and polarization-dependent optical filtering for transflective full-color generation utilizing low-loss phase-change materials

Shuo Deng1, Mengxi Cui1, Jingru Jiang1, Chuang Wang1, Zengguang Cheng3, Huajun Sun1,2, Ming Xu1,2, Hao Tong1,2, Qiang He1,2、*, and Xiangshui Miao1,2
Author Affiliations
  • 1School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2Hubei Yangtze Memory Laboratories, Wuhan 430205, China
  • 3School of Microelectronics, Fudan University, Shanghai 200433, China
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    Figures & Tables(7)
    (Color online) Working principle and the schematic of the proposed tunable metasurface. (a) The schematic of the metasurfaces. The left and right figures respectively illustrate the reflection and transmission colors of the metasurface in the amorphous and crystalline states under TM polarization light. (b) The single unit of the device, consisting of elliptical column Sb2S3 and CF2 as substrate. Rx and Ry represent the major and minor axes of the cylindrical structure respectively, while Tx and Ty are the periodicity of the single unit in the two directions. Additionally, tpcm corresponds to the thickness of the phase change material. (c) Refractive index (blue) and the absorption coefficient (red) of amorphous Sb2S3 (solid line) and crystalline Sb2S3 (dash line) in wavelength between 400 and 800 nm.
    (Color online) The numerical simulation with Ry changing from 10 to 90 nm (from bottom to top). (a), (b) The reflection spectra of the device in amorphous (a) and crystalline state (b) respectively in TM polarization mode. Panel (c) shows Δλ when the PCMs change from amorphous to crystalline. (d), (e) The reflection spectra of the device in amorphous (d) and crystalline state (e) respectively in TE polarization mode. (f) The CIE1931 plot numerically calculated structural color palettes of amorphous (green) and crystalline (red) states under TM (stars) and TE (circles) polarized wave.
    (Color online) The numerical simulation with Rx changing from 90 to 170 nm (from bottom to top). (a), (b) The reflection spectra of the device in amorphous (a) and crystalline state (b) respectively in TM polarization mode. Panel (c) shows Δλ when the PCM change from amorphous to crystalline. (d), (e) The reflection spectra of the device in amorphous (d) and crystalline state (e) respectively in TE polarization mode. (f) The CIE1931 plot numerically calculated structural color palettes of amorphous (green) and crystalline (red) state under TM (stars) and TE (circles) polarized wave.
    (Color online) The numerical simulation with Tx and Ty changing from 300 to 400 nm (from bottom to top). (a), (b) The reflection (a) and transmission (b) spectra of the metasurface in amorphous with changing Ty in TM polarization mode. (c) The CIE1931 plot numerically calculated structural color palettes of reflection (green) and transmission (red). The reflection (d) and transmission (e) spectra of the metasurface in amorphous with changing Tx in TM polarization mode. (f) The CIE1931 plot numerically calculated structural color palettes of reflection (green) and transmission (red).
    (Color online) The electromagnetic multipole decomposition of reflection spectra in TM Mode with fixed periodicity Tx = Ty = 350 nm and tpcm = 120 nm. Different results of three structure geometry in atmosphere (a), (b), (c) and crystalline (d), their structural parameters are (a), (d) Rx/Ry of 130/30 nm, (b) Rx/Ry of 130/60 nm, (c) Rx/Ry of 170/30 nm.
    (Color online) The electromagnetic simulation of single unit. Panel (a) shows the single unit whose structural parameters are Rx/Ry/Tx/Ty/tpcm of 130/30/350/350/120 nm. (b) Reflection spectra of the metasurfaces under TM (left) and TE (right) polarized waves. (c), (d) Electromagnetic field distributions of electric dipole mode and magnetic dipole mode in an amorphous and crystalline state in TE and TM polarization mode. Here the wavelength is 561.5 nm.
    • Table 1. Comparison with existing structure color designs (simulation#, experiment*).

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      Table 1. Comparison with existing structure color designs (simulation#, experiment*).

      MethodTunable or notTuning mechanismTuning abilityColor gamutDisplay modeReflectance and transmittanceReferences
      GratingsYesElectrochemical~97% contrast72% sRGBReflective~80% reflectance*Nat Commun[40]
      Metasurface(nanopillars)YesLiquidGamut improvement78%−181.8% sRGBReflective~80% reflectance*Nat Commun[15]
      Multilayer and metasurfaceYesPhase change material~40% contrast74% sRGBReflective~50% reflectance#J Opt[25]
      Metasurface(nanopillars)No//121% sRGBReflective~50% reflectance*Adv Mater[41]
      Metasurface(nanopores)No//148% sRGBReflective~65% reflectance*Nat Nanotechnol[42]
      Metasurface(nanopillars)YesPhase change material and polarization~80% contrast and ~100 nm Δλ70% sRGBReflective and transmissive~85% reflectance and ~90% transmittance#This work
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    Shuo Deng, Mengxi Cui, Jingru Jiang, Chuang Wang, Zengguang Cheng, Huajun Sun, Ming Xu, Hao Tong, Qiang He, Xiangshui Miao. Reconfigurable and polarization-dependent optical filtering for transflective full-color generation utilizing low-loss phase-change materials[J]. Journal of Semiconductors, 2024, 45(7): 072302

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    Paper Information

    Category: Articles

    Received: Dec. 14, 2023

    Accepted: --

    Published Online: Jul. 18, 2024

    The Author Email: He Qiang (QHe)

    DOI:10.1088/1674-4926/23120025

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