Optical Instruments, Volume. 46, Issue 5, 24(2024)

Image processing method for polarization detection of microdefects in optical components

Xiaohui CHEN1... Xinsen WANG1, and Yafan DUAN1,23,* |Show fewer author(s)
Author Affiliations
  • 1Research Center for Photonics Technology, Quanzhou Normal University, Quanzhou 362000, China
  • 2Fujian Key Laboratory of Advanced Micro-nano Photonics Technology and Devices, Quanzhou, 362000, China
  • 3Fujian Collaborative Innovation Center for Ultra-precision Optical Engineering andApplication, Quanzhou 362000, China
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    Figures & Tables(10)
    Imaging device for surface defect of optical components
    Effects of images
    System resolution testing
    Three kinds of filtering effects
    Threshold segmentation effects
    Morphological processing
    Markers for connected areas
    Detection effect of different defects
    • Table 1. Accuracy of defect detection for each type

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      Table 1. Accuracy of defect detection for each type

      缺陷类型实际个数检测个数准确率/%
      麻点585696.55
      划痕666395.45
      破边302893.33
      脏污908796.67
      合计24423495.90
    • Table 2. Defect size measurement and time consume

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      Table 2. Defect size measurement and time consume

      缺陷样本宽度/μm直径/μm检测耗时/ms
      划痕119.5328
      划痕227.3433
      划痕311.7219
      划痕435.1636
      划痕546.8839
      麻点17.8123
      麻点231.2538
      麻点315.6334
      麻点454.6946
      麻点542.9744
      破边182.6839
      破边2137.2845
      破边372.5440
      破边437.4428
      破边517.1626
      脏污115.7516
      脏污25.789
      脏污37.3514
      脏污411.0318
      脏污517.1531
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    Xiaohui CHEN, Xinsen WANG, Yafan DUAN. Image processing method for polarization detection of microdefects in optical components[J]. Optical Instruments, 2024, 46(5): 24

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    Paper Information

    Category:

    Received: May. 10, 2023

    Accepted: --

    Published Online: Jan. 3, 2025

    The Author Email: DUAN Yafan (393412408@qq.com)

    DOI:10.3969/j.issn.1005-5630.202305100093

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