Optical Instruments, Volume. 46, Issue 5, 24(2024)
Image processing method for polarization detection of microdefects in optical components
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Table 1. Accuracy of defect detection for each type
View tableView in ArticleTable 1. Accuracy of defect detection for each type
缺陷类型 实际个数 检测个数 准确率/％ 麻点 58 56 96.55 划痕 66 63 95.45 破边 30 28 93.33 脏污 90 87 96.67 合计 244 234 95.90
Table 2. Defect size measurement and time consume
View tableView in ArticleTable 2. Defect size measurement and time consume
缺陷样本 宽度/μm 直径/μm 检测耗时/ms 划痕1 19.53 28 划痕2 27.34 33 划痕3 11.72 19 划痕4 35.16 36 划痕5 46.88 39 麻点1 7.81 23 麻点2 31.25 38 麻点3 15.63 34 麻点4 54.69 46 麻点5 42.97 44 破边1 82.68 39 破边2 137.28 45 破边3 72.54 40 破边4 37.44 28 破边5 17.16 26 脏污1 15.75 16 脏污2 5.78 9 脏污3 7.35 14 脏污4 11.03 18 脏污5 17.15 31
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Xiaohui CHEN, Xinsen WANG, Yafan DUAN. Image processing method for polarization detection of microdefects in optical components[J]. Optical Instruments, 2024, 46(5): 24
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Received: May. 10, 2023
Accepted: --
Published Online: Jan. 3, 2025
The Author Email: DUAN Yafan (393412408@qq.com)
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