Acta Optica Sinica, Volume. 30, Issue 5, 1473(2010)
Large Dynamic Range Micro Optical Accelerometer Based on Grating Translation
A novel optic accelerometer based on grating interference and phase generated carrier(PGC) modulation has been fabricated and tested. The reported prototype has sensitivity of above 4×10-5gn. Its dynamic range,which is relative with cantilevers of inertia system,is completely free from the limit of optical structure. In comparison with piezoelectricity and capacitive micro-electro-mechanical systems (MEMS) accelerometers,this device achieves an improvement both in resolution and dynamic range. Applying interference between ±1 refraction beams from a grating to acceleration sensing can also enhance stability and reduce the requirements on the installation of precision. The scheme proposed can also be applied to MEMS technique,which supplies a new thought for the design of high resolution and large dynamic range micro-opto-electromechanical systems (MOEMS) accelerometers.
Get Citation
Copy Citation Text
Chen Liuhua, Lin Qiao, Li Shu, Ni Wei, Wu Xingkun. Large Dynamic Range Micro Optical Accelerometer Based on Grating Translation[J]. Acta Optica Sinica, 2010, 30(5): 1473
Category: Optical Devices
Received: Jun. 2, 2009
Accepted: --
Published Online: May. 11, 2010
The Author Email: Liuhua Chen (clh.osk@gmail.com)