Acta Optica Sinica, Volume. 30, Issue 5, 1473(2010)

Large Dynamic Range Micro Optical Accelerometer Based on Grating Translation

Chen Liuhua*, Lin Qiao, Li Shu, Ni Wei, and Wu Xingkun
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  • [in Chinese]
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    A novel optic accelerometer based on grating interference and phase generated carrier(PGC) modulation has been fabricated and tested. The reported prototype has sensitivity of above 4×10-5gn. Its dynamic range,which is relative with cantilevers of inertia system,is completely free from the limit of optical structure. In comparison with piezoelectricity and capacitive micro-electro-mechanical systems (MEMS) accelerometers,this device achieves an improvement both in resolution and dynamic range. Applying interference between ±1 refraction beams from a grating to acceleration sensing can also enhance stability and reduce the requirements on the installation of precision. The scheme proposed can also be applied to MEMS technique,which supplies a new thought for the design of high resolution and large dynamic range micro-opto-electromechanical systems (MOEMS) accelerometers.

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    Chen Liuhua, Lin Qiao, Li Shu, Ni Wei, Wu Xingkun. Large Dynamic Range Micro Optical Accelerometer Based on Grating Translation[J]. Acta Optica Sinica, 2010, 30(5): 1473

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    Paper Information

    Category: Optical Devices

    Received: Jun. 2, 2009

    Accepted: --

    Published Online: May. 11, 2010

    The Author Email: Liuhua Chen (clh.osk@gmail.com)

    DOI:10.3788/aos20103005.1473

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