Optics and Precision Engineering, Volume. 15, Issue 12, 1838(2007)

Characterization of low-Z material layer profiles in bilayer structures by X-ray reflectivity measurement

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. Characterization of low-Z material layer profiles in bilayer structures by X-ray reflectivity measurement[J]. Optics and Precision Engineering, 2007, 15(12): 1838

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Received: Aug. 20, 2007

Accepted: --

Published Online: Jul. 8, 2008

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