Laser & Optoelectronics Progress, Volume. 54, Issue 4, 40005(2017)
Three-Dimensional Micro- and Nano-Machining Based on Spatiotemporal Focusing Technique of Femtosecond Laser
The fundamental principle of spatiotemporal focusing technique of femtosecond laser is introduced in this paper, and applications of this technique on improving the resolution of femtosecond laser fabrication, suppressing the nonlinear effect of the fabricating process, and improving the materials fabrication quality are reviewed. Discussion is emphasized on the unique optical field characteristics of spatiotemporally focused femtosecond laser pulses including pulse front tilt (PFT) and intensity plane tilt, and their influence on material processing. Moreover, the applications of spatiotemporal focusing technique on high field physics and its scope of applications are introduced. Lastly, we summarize the principles and applications of spatiotemporal focusing technique, and suggest several directions for the future research.
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Jing Chenrui, Wang Zhaohui, Cheng Ya. Three-Dimensional Micro- and Nano-Machining Based on Spatiotemporal Focusing Technique of Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2017, 54(4): 40005
Category: Reviews
Received: Aug. 17, 2016
Accepted: --
Published Online: Apr. 19, 2017
The Author Email: Chenrui Jing (jing1989111@sina.com)