INFRARED, Volume. 41, Issue 8, 15(2020)

Study on Back Thinning Technologies of Long-wave InAs/GaSb Type-Ⅱ Superlattice Infrared Detectors

Yu CHENG*, Ying-hao BAO, Yu XIAO, Chun-ling LI, Zhe KANG, and Ming LIU
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    In long-wave infrared region, InAs/GaSb type-Ⅱ superlattice material has more superior performance than HgCdTe, thus has been widely studied. A series of experiments were carried out on the InAs/GaSb type-Ⅱ superlattice infrared detector to improve the technology level of back thinning. For <100> GaSb single wafers, different single-point diamond turning (SPDT), mechanical chemical polishing and chemical polishing methods were studied. The machining damage was removed. Through the experiments of InAs/GaSb type-Ⅱ superlattice infrared devices, good infrared imaging pictures were obtained by the long-wave detector assembly, which can improve the technology level of InAs/GaSb type-Ⅱ superlattice long-wave infrared detector.

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    CHENG Yu, BAO Ying-hao, XIAO Yu, LI Chun-ling, KANG Zhe, LIU Ming. Study on Back Thinning Technologies of Long-wave InAs/GaSb Type-Ⅱ Superlattice Infrared Detectors[J]. INFRARED, 2020, 41(8): 15

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    Paper Information

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    Received: Jun. 27, 2020

    Accepted: --

    Published Online: Nov. 4, 2020

    The Author Email: Yu CHENG (chengyu0431@aliyun.com)

    DOI:10.3969/j.issn.1672-8785.2020.08.003

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