Acta Photonica Sinica, Volume. 51, Issue 1, 0151122(2022)

Study on Metasurface Ultra-narrowband Infrared MEMS Light Source

Yu ZOU1,2, Wenjing JIANG1、*, and Wen OU1
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China
  • 2University of China Academy of Sciences,Beijing,100049,China
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    References(19)

    [2] Feidie WU, Mingxin JI, Jianye WANG et al. MEMS infrared light source and its application. Transducer and Microsystem Technologies, 25, 78-80(2006).

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    [4] Weibing LIU, Qiulin TAN, Anjie MING et al. Fabrication of high emissivity nano-silicon structure for MEMS infrared light source. Instrument Technique and Sensor, 7-10+82(2017).

    [5] Guoxun WANG, Mingxin JI, Jia ZHOU et al. A new type of MEMS infrared light source based on photonic crystal structure. Nanotechnology and Precision Engineering, 5, 266-268(2007).

    [11] Xiangang LUO. Subwavelength electromagnetics (Volume 1)(2017).

    [13] Xiangang LUO. Subwavelength electromagnetics (Volume 2)(2017).

    [16] D R LIDE. CRC handbook of chemistry and physics 85th edition(2004).

    [17] Xianglei YIN, Jun JIANG. Judgement method of series-parallel resonance in RLC hybrid circuit. Journal of Shaanxi University of Technology (Natural Sciences), 28, 10-13(2012).

    [18] Ting ZHANG, Wei WU, Chengzu LI et al. On the classical theory of metal conductivity. College Physics, 30, 28-30+41(2011).

    [19] R J CAMERON, C M KUDSIA, R R MANSOUR. Microwave filters for communication systems: fundamentals, design and applications(2007).

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    Yu ZOU, Wenjing JIANG, Wen OU. Study on Metasurface Ultra-narrowband Infrared MEMS Light Source[J]. Acta Photonica Sinica, 2022, 51(1): 0151122

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    Paper Information

    Category: Special Issue for Light Field Manipulation and Applications

    Received: Sep. 24, 2021

    Accepted: Dec. 8, 2021

    Published Online: Mar. 10, 2022

    The Author Email: JIANG Wenjing (jiangwenjing@ime.ac.cn)

    DOI:10.3788/gzxb20225101.0151122

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