[1] Y Q CHEN, Z W SHU, S ZHANG et al. Sub-10 nm fabrication： methods and applications. International Journal of Extreme Manufacturing, 17-47(2021).

[2] P ZENG, Z W SHU, S ZHANG et al. Fabrication of single-nanometer metallic gaps via spontaneous nanoscale dewetting. Nanotechnology, 32, 205302(2021).

[3] S BAI, K SUGIOKA. Recent advances in the fabrication of highly sensitive surface-enhanced raman scattering substrates： nanomolar to attomolar level sensing. Light： Advanced Manufacturing, 2, 13(2021).

[4] [4] 4赵进辉， 袁海超， 洪茜， 等. 基于纳米银粒子增强荧光测定鸭肉中土霉素残留量［J］. 光学 精密工程， 2014， 22（11）： 2902-2907. doi: 10.3788/ope.20142211.2902ZHAOJ H， YUANH CH， HONGQ， et al. Determination of oxytetracycline content in duck meat using silver nanoparticle enhanced fluorescence［J］. Optics and Precision Engineering， 2014， 22（11）： 2902-2907. （in Chinese）. doi: 10.3788/ope.20142211.2902

[5] [5] 5陈广甸， 翟雨生， 李裕培， 等. 基于等离激元热电子效应的光电晶体管制备及其特性［J］. 光学 精密工程， 2018， 26（3）： 517-522. doi: 10.3788/ope.20182603.0517CHENG D， ZHAIY SH， LIY P， et al. Fabrication and properties of plasmonic hot-electron phototransistor［J］. Optics and Precision Engineering， 2018， 26（3）： 517-522. （in Chinese）. doi: 10.3788/ope.20182603.0517

[6] P FATHI-HAFSHEJANI, N AZAM, L WANG et al. Two-dimensional-material-based field-effect transistor biosensor for detecting COVID-19 virus （SARS-CoV-2）. ACS Nano, 15, 11461-11469(2021).

[7] P ZENG, Q LIU, M J ZHENG et al. Ion-beam-etching based lift-off for reliable patterning of dense and inverse metallic nanostructures towards 10-nm scale. Microelectronic Engineering, 232, 111406(2020).

[8] K C BANTZ, N C LINDQUIST et al. Vertically oriented sub-10-nm plasmonic nanogap arrays. Nano Letters, 10, 2231-2236(2010).

[9] J THEISS, P PAVASKAR, P M ECHTERNACH et al. Plasmonic nanoparticle arrays with nanometer separation for high-performance SERS substrates. Nano Letters, 10, 2749-2754(2010).

[10] J A FAN, C WU, K BAO et al. Self-assembled plasmonic nanoparticle clusters(2010).

[11] H PARK, A K L LIM, A P ALIVISATOS et al. Fabrication of metallic electrodes with nanometer separation by electromigration. Applied Physics Letters, 75, 301-303(1999).

[12] A F MORPURGO, C M MARCUS, D B ROBINSON. Controlled fabrication of metallic electrodes with atomic separation. Applied Physics Letters, 74, 2084-2086(1999).

[13] L D QIN, S PARK, L HUANG et al. On-wire lithography. Science, 309, 113-115(2005).

[14] N B ZHITENEV, H MENG, Z BAO. Conductance of small molecular junctions. Physical Review Letters, 88, 226801(2002).

[15] Y Q CHEN, Y Q HU, J Y ZHAO et al. Topology optimization-based inverse design of plasmonic nanodimer with maximum near-field enhancement. Advanced Functional Materials, 30, 2000642(2020).

[16] M J ZHENG, Y YANG, D ZHU et al. Enhancing plasmonic spectral tunability with anomalous material dispersion. Nano Letters, 21, 91-98(2021).

[17] H G DUAN, H L HU, K KUMAR et al. Direct and reliable patterning of plasmonic nanostructures with sub-10-nm gaps. ACS Nano, 5, 7593-7600(2011).

[18] Y D WANG, S A BODEN et al. Ultrafast nonlinear control of progressively loaded， single plasmonic nanoantennas fabricated using helium ion milling. Nano Letters, 13, 5647-5653(2013).

[19] [19] 19段辉高， 戴彭， 张轼， 等. 复杂图案轮廓曝光版图的生成及工艺实现［J］. 光学 精密工程， 2019， 27（3）： 584-593. doi: 10.3788/ope.20192703.0584DUANH G， DAIP， ZHANGSH， et al. Realization of complex patterns via “sketch and peel” lithography［J］. Opt. Precision Eng.， 2019， 27（3）： 584-593. （in Chinese）. doi: 10.3788/ope.20192703.0584

[20] [20] 20任延同. 离子刻蚀技术现状与未来发展［J］. 光学 精密工程， 1998， 6（2）： 7-14.RENY T. Presence and future developing tendency of ion etching technology［J］. Optics and Precision Engineering， 1998， 6（2）： 7-14. （in Chinese）

[21] S Y DING, E M YOU, Z Q TIAN et al. Electromagnetic theories of surface-enhanced Raman spectroscopy. Chemical Society Reviews, 46, 4042-4076(2017).

[22] C YANG, P LIANG, L S TANG et al. Synergistic effects of semiconductor substrate and noble metal nano-particles on SERS effect both theoretical and experimental aspects. Applied Surface Science, 436, 367-372(2018).

[23] M J ZHENG, X P ZHU, Y Q CHEN et al. Three-dimensional donut-like gold nanorings with multiple hot spots for surface-enhanced Raman spectroscopy. Nanotechnology, 28(2017).