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Optics and Precision Engineering, Volume. 26, Issue 10, 2395(2018)

Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses

KUANG Shang-qi1,*... LI Shuo1, YANG Hai-gui2, HUO Tong-lin3 and ZHOU Hong-jun3 |Show fewer author(s)
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  • 1[in Chinese]
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  • 3[in Chinese]
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    KUANG Shang-qi, LI Shuo, YANG Hai-gui, HUO Tong-lin, ZHOU Hong-jun. Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses[J]. Optics and Precision Engineering, 2018, 26(10): 2395

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    Received: Jan. 31, 2018

    Accepted: --

    Published Online: Dec. 26, 2018

    The Author Email: Shang-qi KUANG (physicskuang@sina.com)

    DOI:10.3788/ope.20182610.2395

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology