Journal of Terahertz Science and Electronic Information Technology , Volume. 19, Issue 1, 7(2021)
Performance of micro-nano composite structure enhanced silicon-based terahertz modulator
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SHEN Chaoyang, WANG Yuansheng, HE Yulian, YANG Qinghui, CHEN Zhi, WEN Qiye. Performance of micro-nano composite structure enhanced silicon-based terahertz modulator[J]. Journal of Terahertz Science and Electronic Information Technology , 2021, 19(1): 7
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Received: Mar. 10, 2020
Accepted: --
Published Online: Apr. 21, 2021
The Author Email: Chaoyang SHEN (chaoyang_shen@126.com)
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