Acta Optica Sinica, Volume. 35, Issue 2, 212005(2015)
Nano Focusing Method Based on Moire Fringe Phase Analysis
[1] [1] Yao Hanming, Hu Song, Xing Tingwen. Optical Projection Lithography for Micro and Nano- Fabrication[M]. Beijing: Beijing University of Technology Press, 2006. 1-5.
[2] [2] Wang Yangyuan, Kang Jinfeng. Development and challenges of lithography for ULSI [J]. Chinese J Semiconductors, 2002, 23(3): 225-237.
[3] [3] Yoshitada Oshida, M Tanaka, T Tanimoto, et al.. Chip leveling and focusing with laser interferometry [C]. SPIE, 1990, 1264: 244-251.
[4] [4] Masahiro Watanabe, Y Oshida, Y Nakayama, et al.. Focusing and leveling based on wafer surface profile detection with interferometry [C]. SPIE, 1994, 2197: 980-989.
[5] [5] Shaolin Zhou, Yong Yang, Lixin Zhao, et al.. Tilt-modulated spatial phase imaging method for wafer-mask leveling in proximity lithography [J]. Opt Lett, 2010, 35(18): 3132-3134.
[6] [6] Yan Wei, Li Yanli, Chen Mingyong, et al.. Moire fringe-based focusing-test scheme for optical projection lithography [J]. Acta Optica Sinica, 2011, 31(8): 0805001.
[8] [8] Jianming Hu, Aijun Zeng, Xiangzhao Wang. A position sensor based on grating projection with spatial filtering and polarization modulation [J]. Chin Opt Lett, 2006, 4(1): 18-20.
[9] [9] D Goldstein. Polarized Light [M]. New York: Marcel Dekker, Inc. , 2003.
[10] [10] Li Jie, Tang Feng, Wang Xiangzhao, et al.. System errors analysis of grating lateral shearing interferometer [J]. Chinese J Lasers, 2014, 41(5): 0508006.
[11] [11] Cao Shaoqian, Bu Yang, Wang Xiangzhao, et al.. Measurement technique for the Mueller matrix based on a single photo-elastic modulator [J]. Acta Optica Sinica, 2013, 33(1): 0112006.
[12] [12] A D Martino, Y K Kim, E Garcia-Caurel, et al.. Optimized Mueller polarimeter with liquid crystals [J]. Opt Lett, 2003, 28(8): 616-618.
[13] [13] Cai Yanmin, Wang Xiangzhao, Huang Huijie. Optical design of lithography projective lens with variable total track [J]. Chinese J Lasers, 2014, 41(4): 0416003.
Get Citation
Copy Citation Text
Feng Jinhua, Hu Song, Li Yanli, He Yu. Nano Focusing Method Based on Moire Fringe Phase Analysis[J]. Acta Optica Sinica, 2015, 35(2): 212005
Category: Instrumentation, Measurement and Metrology
Received: Jul. 20, 2014
Accepted: --
Published Online: Jan. 9, 2015
The Author Email: Jinhua Feng (girlfjh@163.com)