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Acta Photonica Sinica, Volume. 35, Issue 5, 667(2006)

Multilayers on Extreme Ultraviolet Lithography Masks and Illumination Error

Yang Xiong1...2,*, Jin Chunshui1, and Zhang Lichao12 |Show fewer author(s)
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    Yang Xiong, Jin Chunshui, Zhang Lichao. Multilayers on Extreme Ultraviolet Lithography Masks and Illumination Error[J]. Acta Photonica Sinica, 2006, 35(5): 667

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    Paper Information

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    Received: Mar. 2, 2005

    Accepted: --

    Published Online: Jun. 3, 2010

    The Author Email: Xiong Yang (opticsy@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology