[1] [1] Iga K, Surface emitting laser-It′s birth and generation of new optoelectronics field[J]. IEEE J Sel Topics Quantum Electron, 2000, 6: 1201-1215.

[2] [2] Larsson A. Advances in VCSELs for Communication and Sensing[J]. IEEE J Sel Top Quantum Electron, 2011, 1077-260X: 1-16.

[3] [3] Weigl B, Grabherr M, Michalzik R, et al. High power single-mode selectively oxidized vertical-cavity surface emitting lasers[J]. IEEE Photonics Technology Letters, 1996, 8(8): 971-973.

[4] [4] Morgan R A, Guth G D, Focht M W, et al. Transverse mode control of vertical-cavity top-surface-emitting lasers[J]. IEEE Photonics Technology Letters, 1993, 4(4): 374-377.

[5] [5] Yokouchi N, Danner A J, Choquette K D. Two-dimensional photonic crystal confined vertical-cavity surface-emitting lasers[J]. IEEE J Sel Topics Quantum Electron, 2003, 9(5): 1439-1445.

[6] [6] Tian Kun, Zou Yonggang, Ma Xiaohui, et al. Surface emitting distributed feedback semiconductor lasers[J]. Chinese Optics, 2016, 9(1): 51-64. (in Chinese)

[7] [7] Hong Kuobin, Yang Chunchieh, Lu Tienchang. Blue-Violet GaN-based photonic crystal surface emitting lasers [J]. Chinese Optics, 2014, 7(4): 559-571. (in Chinese)

[8] [8] Liu Di, Ning Yongqiang, Zhang Jinlong, et al. High-power InGaAs/GaAsP strained quantum well vertical-cavity surface-emitting laser array[J]. Optics and Precision Engineering, 2012, 20(10): 2147-2153. (in Chinese)

[9] [9] Xie Y Y, Kan Q, Xu C, et al. Single fundamental mode photonic crystal VCSEL with high power and low threshold current optimized by modal loss analysis[J]. Chinese Physics B, 2017, 26(1): 014203.

[10] [10] Xie Y Y, Xu C, Kan Q, et al. A Single-fundamental-mode photonic crystal vertical cavity surface emitting laser[J]. Chinese Physics Letters, 2010, 27: 024206.

[11] [11] Grabherr M, Jager R, Michalzik R, et al. Efficient single-mode oxide-confined GaAs VCSEL′s emitting in the 850-nm wavelength regime[J]. IEEE Photonics Technology Letters, 1997, 10(10): 1304-1306.

[12] [12] Yuan Wei, Zhang Jianqi, Qin Yuwei, et al. Near infrared spectral region photonic crystal band gaps and KTP defect [J]. Infrared and Laser Engineering, 2016, 45(1): 0104005. (in Chinese)

[13] [13] Leisher P O, Danner A J, Raftery J J, et al. Proton implanted single mode holey vertical-cavity surface emitting lasers[J]. Electronics Letters, 2005, 41(18): 1010-1011.

[14] [14] Mao Mingming, Xu Chen, Wei Simin, et al. The effects of proton implant energy on threshold and output power of vertical cavity surface emitting laser[J]. Acta Physica Sinica, 2012, 61(21): 214207. (in Chinese)

[15] [15] Wang Baoqiang, Xu Chen, Liu Yingming, et al. Study on current spreading of photonic crystal vertical cavity surface emitting lasers[J]. Acta Physica Sinica, 2010, 59(12): 8542-8547. (in Chinese)

[16] [16] Xie Yiyang, Xu Chen, Kan Qiang, et al. VCSEL transverses mode control by 2D photonic crystal[J]. Infrared and Laser Engineering, 2010, 39(3): 460-463. (in Chinese)

[17] [17] Jiang Guoqing, Xu Chen, Xie Yiyang, et al. Fabrication of Proton-implanted Photonic Crystal vertical cavity surface emitting laser [J]. Infrared and Laser Engineering, 2016, 45(12): 1205001. (in Chinese)