[1] [1] C. M. Wu, C. S. Su, G. S. Peng et al.. Polarimetric, nonlinearityfree, homodyne interferometer for vibration measurement ［J］. Metrologia, 1996, 33(6): 533~537

[2] [2] Chen Bo, Zhen Shenglai, Li Min et al.. Fourchannel balancing method for microvibration measurement ［J］. Acta Optica Sinica, 2009, 29(6): 309~312

[3] [3] N. Bobroff. Recent advances in displacement measuring interferometry ［J］. Meas. Sci. Technol., 1993, 4(19): 907~926〖JP〗

[4] [4] Deng Yuanlong, Li Yuezhi, Wu Yubin et al.. Influence of metalcoated mirrors on measurement accuracy in heterodyne interferometric ellipsometry ［J］. Chinese J. Lasers, 2009, 36(2): 439~443

[5] [5] Chen Benyong, Mu Ruizhen, Zhou Yanjiang et al.. Nonlinear error analysis of laser syntheticwavelength nanomeasurement interferometer ［J］. Chinese J. Lasers, 2008, 35(2): 240~244

[6] [6] Chen Hongfang, Ding Xuemei, Zhong Zhi et al.. Method to reduce first harmonic nonlinearity in laser heterodyne interferometry ［J］. Acta Optica Sinica, 2007, 27(6): 1027~1030〖JP〗

[7] [7] Zeng Danhua, Xiao Tiqiao, Xi Zaijun et al.. Detector nonlinear error and compensation in phasestepping interferometry ［J］. Acta Optica Sinica, 2006, 26(9): 1358~1362

[8] [8] Chienming Wu, Chingshen Su. Nonlinearity in measurements of length by optical interferometry ［J］. Meas. Sci. Technol., 1996, 7(1): 62~68

[9] [9] Peter L. M. Heydemann. Determination and correction of quadrature fringe measurement error in interferometers ［J］. Appl. Opt., 1981, 20(19): 3382~3384

[10] [10] C. T. Farrell, M. A. Player. Phase step measurement and variable step algorithms in phaseshifting interferometry ［J］. Meas. Sci. Technol., 1992, 3(10): 953~958

[11] [11] Chienming Wu, Chingshen Su, Gwosheng Peng. Correction of nonlinearity in onefrequency optical interferometry［J］. Meas. Sci. Technol., 1996, 7(4): 520~524

[12] [12] V. Greco, C. Iemmi, S. Ledesma et al.. Multiphase homodyne interferometry analysis of some error sources ［J］. Appl. Opt., 1995, 34(13): 2207~2213

[13] [13] TongJin Park, HyeunSeok Choi, ChangSoo Hanb et al.. Real time precision displacement measurement interferometer using the robust discrete time Kalman filter ［J］. Optics & Laser Technol., 2005, 37(3): 229~234

[14] [14] Zhi Li, Konrad Herrmann, Frank Pohlenz. Correction of nonlinearity in singlefrequency interferometry ［C］. SPIE, 2002, 4902: 398~405

[15] [15] Zhi Li, Konrad Herrmann, Frank Pohlenz. A neural network approach to correcting nonlinearity in optical interferometers ［J］. Meas. Sci. Technol., 2003, 14(3): 376~381

[16] [16] Zhi Li, Konrad Herrmann, Frank Pohlenz. Investigation of neural network modeling for instantaneous phase in singlefrequency interferometry ［J］. Acta Optica Sinica, 2003, 23(1): 121~124

[17] [17] Tony L. Schmitz, Hyo Soo Kim. Monte Carlo evaluation of periodic error uncertainty ［J］. Precision Engineering, 2007, 31(3): 251~259

[18] [18] Taeho Keem, Satoshi Gonda, Ichiko Misumi. Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems ［J］. Appl. Opt., 2004, 43(12): 2443~2448

[19] [19] Taeho Keem, Satoshi Gonda, Ichiko Misumi et al.. Simple, realtime method for removing the cyclic error of a homodyne interferometer with a quadrature detector system ［J］. Appl. Opt., 2005, 44(11): 3492~3498

[20] [20] Yang Jun, Liu Zhihai, Yuan Libo. Effects of wave plate on nonlinear errors in polarization laser interferometer［J］. Acta Photonica Sinica, 2008, 37(2): 364~369