Fig. 1. Different direction requirements of the mirror

Fig. 2. Mirror component model(hidden backplane)

Fig. 3. Naked mirror model

Fig. 4. Naked mirror stiffness

Fig. 5. Boyce motion positioning support form

Fig. 6. Support structure model of mirror component

Fig. 7. Mirror unloading force direction

Fig. 8. Schematic diagram of mirror unloading structure

Fig. 9. Optimization results of unloading force in different directions

Fig. 10. Optimization results of RMS in different directions

Fig. 11. Modal result of the mirror component