Optics and Precision Engineering, Volume. 13, Issue z1, 121(2005)

High precision large flat mirror measurement by angle difference testing

[in Chinese]... [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
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    References(4)

    [6] [6] TAKACS P Z,QIAN SH N,KESTER T,et al.Large-mirror figure measurement by optical profilometry techniques[J].SPIE,1999,3782:266-274.

    [7] [7] GECKELER R D,WEINGARTNER I,JUST A,et al.Use and traceable calibration of autocollimator for ultra-precise measurement of slope and topography[J].SPIE,2001,4401:184-195.

    [8] [8] WEINGARTNER I,SCHULZ M.Novel scanning technique for ultra-precise measurement of topography[J].SPIE,1999,3782:306-317.

    [9] [9] GECKELER R,WEINGARTNER I.Sub-nm topography measurement by deflectometry:flatness standard and wafer nanotopography[J].SPIE,2002,4779:1-12.

    CLP Journals

    [1] ZHU Shuo, ZHANG Xiao-hui. Application of error detaching to Ritchey-Common test for flat mirrors[J]. Optics and Precision Engineering, 2014, 22(1): 7

    [2] Chen Haiping, Li Jiabin, Liu Changchun, Xiong Zhao, Zhou Hai, Yuan Xiaodong, Zheng Wanguo. Research on Angle Measure Error Based on Method of Angle Difference[J]. Acta Optica Sinica, 2014, 34(10): 1012003

    [3] Zhu Shou, Zhang Xiaohui. Analysis and Verification for Accuracy of Ritchey Angle in Flat Mirror Test[J]. Acta Optica Sinica, 2013, 33(6): 612001

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. High precision large flat mirror measurement by angle difference testing[J]. Optics and Precision Engineering, 2005, 13(z1): 121

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    Paper Information

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    Received: Jul. 20, 2005

    Accepted: --

    Published Online: Nov. 3, 2006

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