Fig. 1. Layout of beamline 4B7B

Fig. 2. Layout of single-element monochromator

Fig. 3. Method to construct a grazing incidence reflection Fresnel zone plate

Fig. 4. Method to construct single-order diffraction grating by Kuang Longyu et al^[25]

Fig. 5. Method to construct SRZP from an RZP

Fig. 6. Energy response of SRZP monochromator to blackbody radiation spectrum（design energy point 500 eV）

Fig. 7. Energy response of multilayer（a） SRZP monochromator combined with 50 μm thick Ti filter（b） to 200 eV blackbody radiation spectrum（c）

Fig. 8. Layout of two whole-same monochromatic soft X-ray beams from a share laser plasma source

Fig. 9. Conceptual design of on-line calibration system for ICF soft X-ray components for Shenguang-III prototype facility

Fig. 10. Energy spectrum characteristics and resolution level of each channel of ICF soft X-ray component online calibration system for Shenguang-III prototype facility