[1] [1] HOLMES M, HOCKEN R, TRUMPER D. The long range scanning stage: a novel platform for scanned probe microscopy ［J］. Prec. Eng., 2000,24:191-209.

[2] [2] WANG X Z, DONG X H, GUO J, et al.. Two-dimensional displacement sensing using a cross diffraction grating scheme ［J］. Journal of Optics A: Pure and Applied Optics, 2004,6(1):106-111.

[3] [3] MENG Z X, HU N W. The study on control system of 3D precision positioning stage ［J］. Electric Machines and Control, 2005，9(2)：148-150. (in Chinese)

[4] [4] MA L, RONG W B, SUN L N. Design and analysis of a novel 3-DOF nanopositioning stage ［J］. Opt. Precision Eng.，2006，14(6)：1017-1024. (in Chinese)

[5] [5] LI B Z, YANG Y J, YANG J G, et al.. Design and performance analysis on precise micro-displacement working table ［J］. Machine Design and Research, 2008,24(4):41-44. (in Chinese)

[6] [6] WANG S H, XIE T B, WANG X Z. 2D displacement platform with large travel and nanometer resolution ［J］. Machinery Design & Manufacture，2008，8：133-135. (in Chinese)

[7] [7] YANG J T. Moire fringe subdivided error measured by using the comparison phase method of phase shift［J］.Opt. Precision Eng.,1997，5(2)：104-108. (in Chinese)

[8] [8] CHEN Y R, YANG X D, WANG X Z. A new arrangement method for photoelectric cells and its application ［J］. SPIE, 2006,6357:635741.

[9] [9] WANG S Z, XIE T B, CHANG S P, et al.. Study on Four - quadrant Optoelectronic Detector in Surface Topography Measurement ［J］. China Mechanical Engineering, 2008,19(19):2348-2351. (in Chinese)

[10] [10] LI Q X, WANG D S, LI Y H. Design of Modern Precision Instrument［M］.First edition. Beijing: Tsinghua University Press, 2004:172-176. (in Chinese)