[1] [1] ABADEI S. Microwave tunable device based on thin ferroelectric Film［C］//Milan:European Microwave Conference,2002.

[2] [2] FLORENT K, LAVIZZARI S, DIPIAZZA L, et al. Reliability study of ferroelectric Al:HfO2, thin films for DRAM and NAND applications［J］. IEEE Transactions on Electron Devices,2017,64(10):4091-4098.

[3] [3] ROMANOV M V, KORSAKOV I E, KAUL A R, et al. MOCVD of KNbO3ferroelectric films and their characterization［J］. Chemical Vapor Deposition, 2010, 10(6):318-324.

[4] [4] AKAI D,YOSHITA R, ISHIDA M. (Na, Bi)TiO3 based lead-free ferroelectric thin films on Si substrate for pyroelectric infrared sensors［C］//Irago:Journal of Physics: Conference Series, 2013.

[5] [5] WANG P,TAN C Y,MA Y G,et al.Planar tunable high-temperature superconductor microwave broadband phase shifter with patterned ferroelectric thin film［J］. Superconductor Science and Technology,2006,20(1):77.

[6] [6] JIANG Y, WANG Y, RAJAMANI K C D,et al.BST and other ferroelectric thin films by CCVD and their properties and applications［M］.Croatia:Ferroelectrics-Material Aspects In Tech, 2011.

[7] [7] KUMAR M, ROY S, BHATNAGAR M C, et al. Study of dielectric and pyroelectric properties of Sol-Gel derived BST thin films［J］. Ferroelectrics,2005,329(1):33-37.

[8] [8] BIANY,WANG H,ZHAI J.Low-dielectric-loss barium strontium titanatethin films with MgO buffer layer for tunable microwave devices［J］.Journal of Electronic Materials,2013,42(10):2926-2932.

[9] [9] LIU S J, ZENG X B, CHU J H. Thermal-sensitive BST thin film capacitors for dielectric bolometer prepared by RF magnetron sputtering［J］. Microelectronics Journal,2004, 35(7):601-603.

[10] [10] NODA M, YAMADA T,SEKI K, et al. Comparison of BST film microwave tunable devices based on (100) and (111) MgO substrates［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2010,57(10):2221-2227.

[12] [12] HIRANO H,KIMURA T,KOUTSAROFF I P,et al. Integration of BST varactors with surface acoustic wave device by film transfer technology for tunable RF filters［J］. Journal of Micromechanics and Microengineering, 2013, 23(2):025005.

[14] [14] SAZEGARM,MEHMOOD A,ZHENG Y,et al.Compact tunable loaded line phase shifter based on screen printed BST thick film［C］//Darmstadt: Microwave Conference,IEEE, 2011.

[15] [15] SBROCKEY N M,COLE M W,KALKURT,et al.MOCVDgrowth of compositionally graded BaxSr1-xTiO3thin films［J］. Integrated Ferroelectrics,2011,126(1):21-27.

[16] [16] BUNIATYAN V V, WEIL M, MARTIROSYAN N, et al. pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique［J］.PhysicaStatus Solidi (A) Applications and Materials,2010,207(4):824-830.

[17] [17] KHALFALLAOUI A,VELU G,BURGNIESL,etal.Characterization of doped BST thin films deposited by Sol-Gel for tunable microwave devices［J］. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2010, 57(5):1029-1033.

[18] [18] GAO F,AN J.BST thin films deposited by RF-magnetron sputtering and dielectric property research［C］//Xi’an: 2016 IEEE Advanced Information Management, Communicates, Electronic and Automation Control Conference (IMCEC), IEEE,2016.