Infrared and Laser Engineering, Volume. 34, Issue 1, 27(2005)

Fabrication of phase-transition VO2 thin films and properties

[in Chinese]*, [in Chinese], [in Chinese], and [in Chinese]
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    References(9)

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    [2] [2] Chen S, Yi X, Ma H,et al.A novel structural VO2 micro-optical switch[J]. Optical and Quantum Electronics, 2003, 35:1351-1355.

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    [4] [4] Beteille F, Livage J.Optical switching in VO2 thin films[J].Journal of Sol-Gel Science and Technology,1998,13:915-921.

    [5] [5] Ramana C V, Hussain O M, Srinivasulu B, et al. Spectroscopic characterization of electton-beam evaporated V2O5 thin films[J].Thin Solid Films, 1997, 305:219-266.

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    [7] [7] Changhong Chen, Xinjian Yi, Jing Zhang et al. Linear uncooled microbolometer array based on VOx thin films[J].Infrared Physics and Technology, 2001,42(2):87-90.

    [8] [8] Chain E E. Effect of oxygen in ion-beam sputter deposition of vanadium oxide[J].J Vac Sci Technol,1987,A5(4):1762-1766.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of phase-transition VO2 thin films and properties[J]. Infrared and Laser Engineering, 2005, 34(1): 27

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    Paper Information

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    Received: Apr. 9, 2004

    Accepted: May. 17, 2004

    Published Online: May. 25, 2006

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