Researching | Study on infrared anti-reflection performance of diamond film with surface microstructure

Infrared and Laser Engineering, Volume. 50, Issue 2, 20200199(2021)

Study on infrared anti-reflection performance of diamond film with surface microstructure

Zhaoyang Zhang¹, Junjun Wei¹, Zhongfu Xing^1,2, Zhiyong Peng², Jinlong Liu¹, Liangxian Chen¹, and Chengming Li¹

Author Affiliations

¹Institute for Advanced Materials and Technology, University of Science and Technology, Beijing 100083, China

²Tianjin Jinhang Institute of Technical Physics, Tianjin 300308, China

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Table 1. [in Chinese]
Steps Gas ﬂow of SF₆/sccm Gas ﬂow of C₄F₈/sccm HF Power/W ICP Power/W Temperature/℃ Pressure/mTorr(1 Torr=133.32 Pa) Time/s
1 0 100 10 700 20 40 6
2 100 0 25 700 20 30 7

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Zhaoyang Zhang, Junjun Wei, Zhongfu Xing, Zhiyong Peng, Jinlong Liu, Liangxian Chen, Chengming Li. Study on infrared anti-reflection performance of diamond film with surface microstructure[J]. Infrared and Laser Engineering, 2021, 50(2): 20200199

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Paper Information

Category: Materials and Thin films

Received: May. 28, 2020

Accepted: --

Published Online: Mar. 24, 2021

The Author Email:

DOI:10.3788/IRLA20200199

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology